IGEE at Yonsei University

Logo and menus

Full Menu

To support a wide range of research activities that contribute to achieving the SDGs, the Social Engagement Fund (SEF) program was launched in July of 2018. Students and researchers around the world were called to submit research and project proposals that emphasized implementing and evaluating the impact of the SDGs, which can also result in tangible outputs on top of knowledge alone. The entries were screened by a number of expert panels.

Review of NF3 greenhouse gas legislation and design of an integrated environmental management plan for carbon neutrality

Keyword : Carbon Neutrality, NF3, Climate Change, Legislation

Date : 2023-07-27 | Read : 15,607

According to the IPCC report, NF3 (nitrogen trifluoride) is a powerful greenhouse gas of which an atmospheric lifespan is about 700 years. The gas is mainly used in etching and deposition processes in semiconductor and LCD manufacturing processes.

We would like to review the research trends of NF3, regulations under the current law, and reduction measures, and suggest the need for regulation of NF3. In addition, we would like to design an environmental management plan to understand the extent and scope of laws and regulations being applied to actual workplaces.

This research project will ultimately alert semiconductor companies to NF3 emissions and promote research and investment in the re-collection technology of NF3. Also by securing research subsidies, Korean companies can take the lead in NF3 purification technology in producing eco-friendly semiconductors.